A Monolithic CMOS Magnetic Hall Sensor with High Sensitivity and Linearity Characteristics
نویسندگان
چکیده
This paper presents a fully integrated linear Hall sensor by means of 0.8 μm high voltage complementary metal-oxide semiconductor (CMOS) technology. This monolithic Hall sensor chip features a highly sensitive horizontal switched Hall plate and an efficient signal conditioner using dynamic offset cancellation technique. An improved cross-like Hall plate achieves high magnetic sensitivity and low offset. A new spinning current modulator stabilizes the quiescent output voltage and improves the reliability of the signal conditioner. The tested results show that at the 5 V supply voltage, the maximum Hall output voltage of the monolithic Hall sensor microsystem, is up to ±2.1 V and the linearity of Hall output voltage is higher than 99% in the magnetic flux density range from ±5 mT to ±175 mT. The output equivalent residual offset is 0.48 mT and the static power consumption is 20 mW.
منابع مشابه
Scanning hall probe microscopy technique for investigation of magnetic properties
Scanning Hall Probe Microscopy (SHPM) is a scanning probe microscopy technique developed to observe and image magnetic fields locally. This method is based on application of the Hall Effect, supplied by a micro hall probe attached to the end of cantilever as a sensor. SHPM provides direct quantitative information on the magnetic state of a material and can also image magnetic induction under a...
متن کاملDesign of High Sensitivity and Linearity Microelectromechanical Systems Capacitive Tire Pressure Sensor using Stepped Membrane
This paper is focused on a novel design of stepped diaphragm for MEMS capacitive pressure sensor used in tire pressure monitoring system. The structure of sensor diaphragm plays a key role for determining the sensitivity of the sensor and the non-linearity of the output.First the structures of two capacitive pressure sensors with clamped square flatdiaphragms, with different thicknesses are inv...
متن کاملScanning hall probe microscopy technique for investigation of magnetic properties
Scanning Hall Probe Microscopy (SHPM) is a scanning probe microscopy technique developed to observe and image magnetic fields locally. This method is based on application of the Hall Effect, supplied by a micro hall probe attached to the end of cantilever as a sensor. SHPM provides direct quantitative information on the magnetic state of a material and can also image magnetic induction under a...
متن کاملA CMOS image sensor for Earth observation with high efficiency snapshot shutter
This article describes a 4 / 16 Mpixel CMOS image sensor with 106 dB efficiency snapshot electronic shutter and 62 dB dynamic range within +/3 % linearity. It is monolithic, front side illuminated and processed on plain 0.35 μm process with stitching. This sensor could be an interesting alternative to power consuming TDI CCD sensors in LEO orbit configuration.
متن کاملA Highly Sensitive CMOS Digital Hall Sensor for Low Magnetic Field Applications
Integrated CMOS Hall sensors have been widely used to measure magnetic fields. However, they are difficult to work with in a low magnetic field environment due to their low sensitivity and large offset. This paper describes a highly sensitive digital Hall sensor fabricated in 0.18 μm high voltage CMOS technology for low field applications. The sensor consists of a switched cross-shaped Hall pla...
متن کامل